China’s largest foundry testing first domestic immersion DUV lithography tool — SMIC takes significant step on road to wafer fab equipment self-sufficiency

SMIC, the largest foundry in China, is test-driving one of China’s first domestic immersion DUV lithography tools, reports Financial Times. The system was developed by Shanghai Yuliangsheng Technology Co., which is linked to Huawei’s SiCarrier, and is believed to be a significant part of China’s effort to become self-sufficient in wafer fab equipment.

SMIC’s test platform from Yuliangsheng involves a DUV machine that uses immersion lithography and is reportedly designed for 28nm-class fabrication…